Under the link Technical Papers, two McCarter SPIE papers can be found discussing our test results of the superfinishing method.
McCarter's patented superfinishing method along with our experience in fabricating highly complex and precise silicon components allows us to offer a material that inherently does not creep or jitter - Single Crystal Silicon (SCSi).
In addition, our finishing process yields components that are near net shaped with little or no residual subsurface or surface damage, thereby reducing or eliminating lapping for some types of optics. This reduces the time for and cost of final figuring and produces a stable substrate.
Surface finish directly affects the performance of SCSi. Damage on the surface affects thermal-optical properties like transmission, absorption and reflection, while subsurface damage affects thermal-mechanical properties like strength, microyield, hardness, and fracture toughness.
As shown in the table from Argonne National Laboratory, only a thin layer of damage remains after the McCarter superfinishing method which can then be easily removed by acid etching.
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